Wafer-scale Quasi-van der Waals Epitaxy of Mixed-Dimensional III-Nitrides by Metal Organic Chemical Vapor Deposition
Seokho MoonPohang University of Science and Technology, Pohang, Republic of Korea _______________________________________ Quasi-van der Waals (QvdW) epitaxy, where a 3D thin film is grown on a 2D material via weak interfacial interactions, has emerged as a powerful approach for overcoming lattice-mistmatch constraints in heteroepitaxy. Unlike conventional epitaxy, where strong chemical bonding imposes strict requirements on…